Design and realization of cap-shaped cilia MEMS vector hydrophone
Shan Zhu, Guojun Zhang, Zhenzhen Shang, Xi Yang, Ting Lv, Xiaoqi Liang, Xiaoyong Zhang, Peng Chen, Wendong Zhang
Topics & Concepts
HydrophoneSensitivity (control systems)DirectivityAcousticsUnderwaterBandwidth (computing)Microelectromechanical systemsCantileverJitterOpticsPhysicsMaterials scienceElectronic engineeringEngineeringAntenna (radio)Electrical engineeringAerospace engineeringTelecommunicationsOptoelectronicsGeologyOceanographyUnderwater Acoustics ResearchAcoustic Wave Phenomena ResearchSpeech and Audio Processing