Metal Oxides/Carbon Felt Pressure Sensors with Ultra‐Broad‐Range High Sensitivity
Xiu‐man Wang, Yujun Chai, Zeping Wang, Jiabing Yu, Xianping Chen, C.P. Wong
Abstract
Abstract Flexible piezoresistive pressure sensors have been extensively used in the field of wearable sensors. However, it is difficult to achieve both ultrahigh sensitivity and pressure range, with traditional pressure sensors. Therefore, a new Co 3 O 4 /carbon felt pressure sensor is proposed here, where Co 3 O 4 as nanospacer provides low initial current without loading. Carbon felt with a rough surface as a flexible substrate provides a high output current under loading and extends the measurement range of the pressure sensors. The high sensitivity of the pressure sensors can be achieved with a low initial current and high output current. The Co 3 O 4 /carbon felt pressure sensors exhibit high sensitivity (243 kPa −1 ), ultralow detection limit (1.3 Pa), fast response (14 ms), and broad range (up to 180 kPa) of measurements. These excellent performances indicate that the Co 3 O 4 /carbon felt pressure sensor has great potential for application in wearable, healthcare devices. Furthermore, this strategy can be extended to the fabrication of other metal oxides/carbon felt pressure sensors.