Tailoring pulsed laser deposition fabricated copper oxide film by controlling plasma parameters
Lenka Volfová, Ștefan Andrei Irimiciuc, Sergii Chertopalov, Petr Hruška, Jakub Čı́žek, Martin Vondráček, Michal Novotný, Maik Butterling, Maciej Oskar Liedke, A. Wagner, J. Lančok
Topics & Concepts
CopperPulsed laser depositionMaterials scienceAnalytical Chemistry (journal)Deposition (geology)OxidePositron annihilation spectroscopyVacancy defectSpectroscopyCopper oxidePhase (matter)PlasmaThin filmChemistryCrystallographyNanotechnologyMetallurgyPositronElectronPositron annihilationOrganic chemistryChromatographyPaleontologySedimentPhysicsBiologyQuantum mechanicsCopper-based nanomaterials and applicationsZnO doping and propertiesCopper Interconnects and Reliability