Recovery and reuse of magnetic silica-coated iron oxide particles for eco-friendly chemical mechanical planarization
Jihoon Seo, Jae Uk Hur, Sung Min Kim, Young Seo Kim, Young Hwan Kim, Kiho Bae, Kangchun Lee, Gye Seok An
Topics & Concepts
Chemical-mechanical planarizationSlurryEnvironmentally friendlyMaterials scienceReuseMagnetiteChemical engineeringMagnetic separationIron oxideMagnetic nanoparticlesAdsorptionSurface modificationInertNanotechnologyNanoparticleLayer (electronics)Waste managementComposite materialMetallurgyChemistryOrganic chemistryEngineeringBiologyEcologyAdvanced Surface Polishing TechniquesMinerals Flotation and Separation TechniquesRecycling and Waste Management Techniques