A self-adaptive DBSCAN-based method for wafer bin map defect pattern classification
Shouhong Chen, Mulan Yi, Yuxuan Zhang, Xingna Hou, Yuling Shang, Ping Yang
Topics & Concepts
DBSCANCluster analysisComputer scienceWaferPattern recognition (psychology)BinArtificial intelligenceProcess (computing)Data miningNoise (video)Feature extractionFeature (linguistics)AlgorithmCURE data clustering algorithmEngineeringImage (mathematics)Fuzzy clusteringPhilosophyElectrical engineeringOperating systemLinguisticsIndustrial Vision Systems and Defect DetectionIntegrated Circuits and Semiconductor Failure AnalysisAdvancements in Photolithography Techniques