Interplay between solution chemistry and mechanical activation in friction-induced material removal of silicon surface in aqueous solution
Chen Xiao, Changbang Deng, Peng Zhang, Linmao Qian, Seong H. Kim
Topics & Concepts
Etching (microfabrication)Aqueous solutionNanomanufacturingIsotropic etchingPolishingSiliconMaterials scienceMechanochemistrySubstrate (aquarium)Chemical engineeringYield (engineering)Chemical reactionChemical-mechanical planarizationChemistryNanotechnologyComposite materialPhysical chemistryMetallurgyOrganic chemistryOceanographyEngineeringLayer (electronics)GeologyForce Microscopy Techniques and ApplicationsAdvanced Surface Polishing TechniquesIntegrated Circuits and Semiconductor Failure Analysis