Litcius/Paper detail

Recent Developments in Femtosecond Laser-Enabled TriBeam Systems

McLean P. Echlin, Andrew Polonsky, J. Lamb, Remco Geurts, Steven Randolph, Aurélien Botman, Tresa M. Pollock

2021JOM34 citationsDOIOpen Access PDF

Topics & Concepts

FemtosecondMaterials scienceLaserFocused ion beamCeramicOptoelectronicsOpticsNanotechnologyIonComposite materialPhysicsQuantum mechanicsElectron and X-Ray Spectroscopy TechniquesAdvanced Electron Microscopy Techniques and ApplicationsIntegrated Circuits and Semiconductor Failure Analysis