Thermal scanning probe lithography
Edoardo Albisetti, Annalisa Calò, Alessandra Zanut, Xiaorui Zheng, Giuseppe Maria de Peppo, Elisa Riedo
Topics & Concepts
NanolithographyLithographyNanotechnologyMaterials scienceResistFabricationPhotolithographyMetrologyNanoelectronicsOptoelectronicsOpticsPhysicsMedicinePathologyAlternative medicineLayer (electronics)Force Microscopy Techniques and ApplicationsSurface and Thin Film PhenomenaAdvanced Electron Microscopy Techniques and Applications