Litcius/Paper detail

Thermal scanning probe lithography

Edoardo Albisetti, Annalisa Calò, Alessandra Zanut, Xiaorui Zheng, Giuseppe Maria de Peppo, Elisa Riedo

2022Nature Reviews Methods Primers52 citationsDOIOpen Access PDF

Topics & Concepts

NanolithographyLithographyNanotechnologyMaterials scienceResistFabricationPhotolithographyMetrologyNanoelectronicsOptoelectronicsOpticsPhysicsMedicinePathologyAlternative medicineLayer (electronics)Force Microscopy Techniques and ApplicationsSurface and Thin Film PhenomenaAdvanced Electron Microscopy Techniques and Applications