High speed stress measurement technique based on photoelastic modulator (PEM) and galvano-scanner
Fei Su, Bowen Zhang, Tenghui Li
Topics & Concepts
GalvanometerScannerMetering modeMaterials scienceWaferResidual stressLaser scanningOpticsObservational errorLaserOptoelectronicsPhysicsStatisticsMathematicsComposite materialThermography and Photoacoustic TechniquesAdvanced Surface Polishing TechniquesForce Microscopy Techniques and Applications