Lateral pull-in instability of electrostatic MEMS transducers employing repulsive force
Meysam Daeichin, Ronald N. Miles, Shahrzad Towfighian
Topics & Concepts
Nonlinear systemBifurcationCapacitive sensingTransducerMicroelectromechanical systemsInstabilityPhysicsClassical mechanicsStiffnessControl theory (sociology)MechanicsTransverse planeMathematical analysisAcousticsMathematicsEngineeringComputer scienceStructural engineeringControl (management)Artificial intelligenceElectrical engineeringThermodynamicsQuantum mechanicsAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsAcoustic Wave Resonator Technologies