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Investigation of polyvinylpyrrolidone as an inhibitor for trench super-filling of cobalt electrodeposition

Xiuren Ni, Yuanming Chen, Xiaofeng Jin, Chong Wang, Yunzhong Huang, Yan Hong, Xinhong Su, Guoyun Zhou, Shouxu Wang, Wei He, Qingguo Chen

2020Journal of the Taiwan Institute of Chemical Engineers27 citationsDOI

Topics & Concepts

CobaltPolyvinylpyrrolidoneMaterials scienceCyclic voltammetryChemical engineeringCrystal (programming language)ElectrochemistryElectroplatingAdsorptionNanotechnologyInorganic chemistryElectrodeChemistryPolymer chemistryOrganic chemistryPhysical chemistryMetallurgyComputer scienceLayer (electronics)EngineeringProgramming languageElectrodeposition and Electroless CoatingsSemiconductor materials and interfacesCorrosion Behavior and Inhibition
Investigation of polyvinylpyrrolidone as an inhibitor for trench super-filling of cobalt electrodeposition | Litcius