Design of hard coatings deposited by HiPIMS and dcMS
Anas Ghailane, M. Makha, Hicham Larhlimi, Jones Alami
Topics & Concepts
High-power impulse magnetron sputteringMaterials sciencePhysical vapor depositionSputter depositionCoatingCavity magnetronDeposition (geology)Chemical vapor depositionVapour depositionSputteringMetallurgyThin filmNanotechnologyBiologySedimentPaleontologyMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchSemiconductor materials and devices