Design and experiment of a touch mode MEMS capacitance vacuum gauge with square diaphragm
Xiaodong Han, Mahui Xu, Gang Li, Huangping Yan, Yongjian Feng, Detian Li
Topics & Concepts
CapacitanceMicroelectromechanical systemsPressure measurementDiaphragm (acoustics)Materials sciencePressure sensorAcousticsGauge (firearms)Deflection (physics)Differential capacitanceSquare (algebra)Atmospheric pressureOpticsMechanicsElectrical engineeringPhysicsMechanical engineeringEngineeringOptoelectronicsVibrationMathematicsGeometryQuantum mechanicsMeteorologyMetallurgyElectrodeAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsAdvanced Fiber Optic Sensors