High responsivity and stability of MSM structured MoS<sub>2</sub> photodetectors by remote hydrogen plasma treatment and alternating growth of Al<sub>2</sub>O<sub>3</sub>/HfO<sub>2</sub> passivation layers
Yulin Li, Yajun Tian, Lingjie Bao, Haoran Cheng, Qijin Cheng
Abstract
A simple and efficient strategy involving hydrogen plasma treatment and Al 2 O 3 /HfO 2 passivation has been proposed to improve the performance of MoS 2 photodetectors. The obtained MoS 2 photodetector features a high responsivity and excellent stability.
Topics & Concepts
ResponsivityPhotodetectorPassivationMaterials sciencePlasmaHydrogenOptoelectronicsNanotechnologyChemistryPhysicsLayer (electronics)Quantum mechanicsOrganic chemistry2D Materials and ApplicationsPerovskite Materials and ApplicationsMXene and MAX Phase Materials