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Epitaxial growth of high-quality yttria-stabilized zirconia films with uniform thickness on silicon by the combination of PLD and RF sputtering

Pengfei Qu, Peng Jin, Guangdi Zhou, Zhen Wang, Ju Wu, Zhanguo Wang

2023Surface and Coatings Technology10 citationsDOI

Topics & Concepts

Yttria-stabilized zirconiaMaterials scienceSubstrate (aquarium)EpitaxyCubic zirconiaSputter depositionSurface roughnessSiliconComposite materialLayer (electronics)SputteringPulsed laser depositionOptoelectronicsThin filmCeramicNanotechnologyOceanographyGeologyElectronic and Structural Properties of OxidesSemiconductor materials and devicesAdvancements in Solid Oxide Fuel Cells
Epitaxial growth of high-quality yttria-stabilized zirconia films with uniform thickness on silicon by the combination of PLD and RF sputtering | Litcius