AI classification of wafer map defect patterns by using dual-channel convolutional neural network
Shouhong Chen, Yuxuan Zhang, Mulan Yi, Yuling Shang, Ping Yang
Topics & Concepts
WaferPattern recognition (psychology)Convolutional neural networkArtificial intelligenceComputer scienceArtificial neural networkConvolution (computer science)Feature extractionChannel (broadcasting)Support vector machineFeature (linguistics)Electronic engineeringEngineeringMaterials scienceOptoelectronicsPhilosophyLinguisticsComputer networkIndustrial Vision Systems and Defect DetectionIntegrated Circuits and Semiconductor Failure AnalysisAdvancements in Photolithography Techniques