Synthesis and characterization of super-hard AlCrTiVZr high-entropy alloy nitride films deposited by HiPIMS
Yi Xu, Guang Li, Xia Yuan
Topics & Concepts
High-power impulse magnetron sputteringMaterials scienceMicrostructureNitrideAmorphous solidSputteringAnalytical Chemistry (journal)Sputter depositionThin filmAlloyComposite materialNanotechnologyCrystallographyChemistryLayer (electronics)ChromatographyMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchHigh Entropy Alloys Studies