Effects of etching processes on surface dark current of long-wave infrared InAs/GaSb superlattice detectors
Jiajia Xu, Zhicheng Xu, Zhizhong Bai, Min Huang, Aibo Huang, Lulu Zheng, Yi Zhou, Honglei Chen, Jianxin Chen, Ruijun Ding, Li He
Topics & Concepts
Dark currentMaterials scienceOptoelectronicsDry etchingEtching (microfabrication)SuperlatticeInfraredInfrared detectorSpecific detectivityCurrent densityResponsivityOpticsPhotodetectorNanotechnologyPhysicsLayer (electronics)Quantum mechanicsAdvanced Semiconductor Detectors and MaterialsSemiconductor Quantum Structures and DevicesChalcogenide Semiconductor Thin Films