A fast ramp-up framework for wafer yield improvement in semiconductor manufacturing systems
Hongwei Xu, Qihua Zhang, Yan‐Ning Sun, Qun-Long Chen, Wei Qin, Youlong Lv, Jie Zhang
Topics & Concepts
WaferSemiconductor device fabricationYield (engineering)SemiconductorSemiconductor device modelingEngineeringManufacturing engineeringMaterials scienceReliability engineeringEngineering physicsElectronic engineeringElectrical engineeringMetallurgyCMOSAdvancements in Photolithography TechniquesIndustrial Vision Systems and Defect DetectionSilicon and Solar Cell Technologies