Diffraction characteristics and formation mechanism of nanogratings in tip-based down-milling
Bo Xue, Jinming Zhang, Sun Qisheng, Yanquan Geng, Yongda Yan, Hai-long Cui
Topics & Concepts
DiffractionDiffraction efficiencyGratingMaterials scienceOpticsBlazed gratingDiffraction gratingWavelengthOptoelectronicsPhysicsOptical Coatings and GratingsAdvanced Surface Polishing TechniquesNanofabrication and Lithography Techniques