A novel visible-light catalyzed assisted single crystal diamond chemical mechanical polishing slurry and polishing mechanism
Huipeng Yang, Zhuji Jin, Hao Niu, Yu Shen, Xiaoyu Zhang, Mengcan Ao
Topics & Concepts
Materials scienceSlurryDiamondPolishingX-ray photoelectron spectroscopyChemical-mechanical planarizationAbrasiveSurface roughnessSingle crystalCrystal (programming language)Chemical engineeringAnalytical Chemistry (journal)Composite materialCrystallographyChemistryOrganic chemistryEngineeringProgramming languageComputer scienceDiamond and Carbon-based Materials ResearchElectronic and Structural Properties of OxidesAdvanced materials and composites