Miniature capacitance diaphragm gauge for absolute vacuum measurement
Xiaodong Han, Gang Li, Mahui Xu, Chaomao Guo, Yongjun Wang, Yongjian Feng, Detian Li
Topics & Concepts
Diaphragm (acoustics)CapacitancePressure measurementMaterials scienceRepeatabilityMiniaturizationGauge (firearms)GetterVacuum levelVacuum chamberUltra-high vacuumElectrical engineeringOptoelectronicsMechanical engineeringComposite materialNanotechnologyMetallurgyEngineeringChemistryPhysicsElectrodePhysical chemistryChromatographyLoudspeakerQuantum mechanicsMechanical and Optical ResonatorsAdvanced MEMS and NEMS TechnologiesAdvanced Sensor Technologies Research