Litcius/Paper detail

Electrical characterization of silicon nitride interlayer-based MIS diode

A. Büyükbaş-Uluşan, A. Tataroğlu

2020Journal of Materials Science Materials in Electronics21 citationsDOI

Topics & Concepts

Thermionic emissionSchottky diodeMaterials scienceOptoelectronicsDiodeEquivalent series resistanceSilicon nitrideReverse leakage currentWaferBiasingSiliconSchottky barrierNitrideAnalytical Chemistry (journal)VoltageChemistryNanotechnologyElectronElectrical engineeringLayer (electronics)EngineeringQuantum mechanicsPhysicsChromatographySemiconductor materials and interfacesSemiconductor materials and devicesIntegrated Circuits and Semiconductor Failure Analysis
Electrical characterization of silicon nitride interlayer-based MIS diode | Litcius