Litcius/Paper detail

Low actuation voltage cantilever-type RF-MEMS shunt switches for 5G applications

Heba Saleh, Milad Shojaeian, Rayan Bajwa, İbrahim Tekin, Murat Kaya Yapici

2022Microelectronics Reliability24 citationsDOI

Topics & Concepts

CantileverMicroelectromechanical systemsInsertion lossShunt (medical)VoltageHFSSRF switchCapacitanceRadio frequencyMaterials scienceElectronic engineeringElectrical engineeringEngineeringOptoelectronicsElectrodePhysicsMicrostrip antennaCardiologyAntenna (radio)Composite materialMedicineQuantum mechanicsAdvanced MEMS and NEMS TechnologiesMicrowave Engineering and WaveguidesPhotonic and Optical Devices