High-pure AlN crystalline thin films deposited on GaN at low temperature by plasma-enhanced ALD
Xiaohong Zeng, Ying Wu, Gaohang He, Wenqing Zhu, Sunan Ding, Zhongming Zeng, Zhongming Zeng
Topics & Concepts
Materials scienceAtomic layer depositionPassivationNitrideOptoelectronicsGallium nitrideThin filmPlasmaLayer (electronics)AluminiumAluminium nitrideSapphireNanotechnologyComposite materialOpticsPhysicsQuantum mechanicsLaserGaN-based semiconductor devices and materialsSemiconductor materials and devicesGa2O3 and related materials