Insight into traps at Al2O3/p-GaN metal-oxide-semiconductor interface fabricated on free-standing GaN substrate
Liwen Sang, Bing Ren, Toshihide Nabatame, Masatomo Sumiya, Meiyong Liao
Topics & Concepts
Materials scienceOptoelectronicsCapacitanceSemiconductorOxideSubstrate (aquarium)SapphireHysteresisCondensed matter physicsElectrodeChemistryOpticsOceanographyMetallurgyGeologyPhysical chemistryLaserPhysicsGaN-based semiconductor devices and materialsSemiconductor materials and devicesGa2O3 and related materials