Defect accumulation in β-Ga2O3 implanted with Yb
Mahwish Sarwar, R. Ratajczak, Cyprian Mieszczyński, A. Wierzbicka, Sylwia Gierałtowska, René Heller, Stefan Eisenwinder, Wojciech Wozniak, E. Guziewicz
Topics & Concepts
Materials scienceFluenceAnnealing (glass)Radiation damageIonIon implantationRutherford backscattering spectrometryCrystallographyIrradiationSingle crystalAnalytical Chemistry (journal)Crystal structureDiffractionCrystallographic defectNanotechnologyThin filmOpticsMetallurgyChemistryPhysicsOrganic chemistryChromatographyNuclear physicsGa2O3 and related materialsNuclear materials and radiation effectsElectronic and Structural Properties of Oxides