Effects of electrolyte type and concentration on the anodic oxidation of 4H-SiC (0001) in slurryless electrochemical mechanical polishing
Xiaozhe Yang, Xu Yang, Kazuya Yamamura
Topics & Concepts
ElectrolyteAnodeElectrochemistryConductivityPolishingMaterials scienceSurface roughnessOxideInorganic chemistryChemical engineeringChemistryMetallurgyElectrodeComposite materialEngineeringPhysical chemistryAdvanced Surface Polishing TechniquesIntegrated Circuits and Semiconductor Failure AnalysisAdvanced Machining and Optimization Techniques