Benzyl-containing quaternary ammonium salt as a new leveler for microvia copper electroplating
Yachao Meng, Miaomiao Zhou, Wei Huang, Yulin Min, Xixun Shen, Qunjie Xu
Topics & Concepts
Cyclic voltammetryChemistryCopperInorganic chemistryLinear sweep voltammetryAdsorptionChlorideElectrochemistryAmmoniumAmmonium chlorideSalt (chemistry)AlkylOrganic chemistryElectrodePhysical chemistryElectrodeposition and Electroless CoatingsCopper Interconnects and ReliabilitySemiconductor materials and devices