Data-driven based cross-coupling compensation method for the piezoelectric tube scanner of atomic force microscopes
Yixuan Meng, Linlin Li, Xiangyuan Wang, Xinquan Zhang, Limin Zhu
Topics & Concepts
Feed forwardScannerSIGNAL (programming language)Compensation (psychology)Sampling (signal processing)Coupling (piping)HarmonicControl theory (sociology)Controller (irrigation)PiezoelectricityPhase (matter)AcousticsAtomic force microscopyMaterials sciencePhysicsOpticsEngineeringComputer scienceNanotechnologyArtificial intelligenceControl engineeringControl (management)AgronomyProgramming languageQuantum mechanicsPsychoanalysisPsychologyDetectorBiologyMetallurgyForce Microscopy Techniques and ApplicationsPiezoelectric Actuators and ControlAdvanced Measurement and Metrology Techniques