Hydrogenation behaviors in passivated emitter and rear silicon solar cells with variously hydrogenated SiNx films
Tsung‐Cheng Chen, Ing‐Song Yu, Zu-Po Yang
Topics & Concepts
PassivationMaterials scienceSiliconHydrogenSilicon nitrideCarrier lifetimeChemical vapor depositionSolar cellCommon emitterOptoelectronicsCrystalline siliconNanotechnologyChemistryLayer (electronics)Organic chemistrySilicon and Solar Cell TechnologiesThin-Film Transistor TechnologiesIntegrated Circuits and Semiconductor Failure Analysis