Ultra-low-voltage operation, large ferroelectric polarization, fast switching speed, and high endurance of 450 °C processed HZO thin films by starting-layer engineering
Jintai Liu, Binjian Zeng, Qijun Yang, Qijun Yang, Zhibin Yang, Changyuan Yu, Changfan Ju, Shuaizhi Zheng, Qiangxiang Peng, Yichun Zhou, Qiong Yang, Qiong Yang, Min Liao, Min Liao
Topics & Concepts
FerroelectricityMaterials sciencePolarization (electrochemistry)OptoelectronicsLayer (electronics)VoltageThin filmThin layerElectrical engineeringNanotechnologyDielectricEngineeringChemistryPhysical chemistryFerroelectric and Negative Capacitance DevicesFerroelectric and Piezoelectric MaterialsAdvanced Memory and Neural Computing