A high-precision Mark positioning algorithm based on sub-pixel shape template matching in wafer bonding alignment
Rui Wang, Kaiming Yang, Yu Zhu
Topics & Concepts
PixelComputer scienceTemplate matchingArtificial intelligenceComputer visionAlgorithmRobustness (evolution)WaferEnhanced Data Rates for GSM EvolutionImage (mathematics)EngineeringElectrical engineeringGeneChemistryBiochemistryAdvanced Measurement and Metrology TechniquesAdvanced Numerical Analysis TechniquesManufacturing Process and Optimization