Influence of surface damage on the optical properties of sapphire and its etching repair method
Zhipeng Su, Zhiqiang Liang, Yue Ma, Yuchao Du, Lin Guo, Bin Zhao, Tianfeng Zhou, Xibin Wang
Topics & Concepts
Materials scienceSapphireEtching (microfabrication)Composite materialLaserDry etchingSurface (topology)OptoelectronicsOpticsLayer (electronics)PhysicsGeometryMathematicsLaser Material Processing TechniquesAdvanced Surface Polishing TechniquesSurface Roughness and Optical Measurements