Highly sensitive thick diaphragm-based surface acoustic wave pressure sensor
Maria Muzamil Memon, Shuliang Pan, Jiang Wan, Tao Wang, Wanli Zhang
Topics & Concepts
Diaphragm (acoustics)Sensitivity (control systems)Materials sciencePressure sensorAcousticsFinite element methodSurface acoustic waveResonatorOptoelectronicsElectronic engineeringVibrationEngineeringStructural engineeringMechanical engineeringPhysicsAcoustic Wave Resonator TechnologiesMechanical and Optical ResonatorsAdvanced MEMS and NEMS Technologies