Litcius/Paper detail

Study on the transformation and control mechanism of amorphous damage during the grinding process of monocrystalline silicon considering grain shapes by MD method

Ming Li, Xiaoguang Guo, Renke Kang, Dongming Guo, Ping Zhou

2023Tribology International22 citationsDOI

Topics & Concepts

Monocrystalline siliconMaterials scienceGrindingSiliconHydrostatic pressureExtrusionAmorphous solidComposite materialMetallurgyCrystallographyMechanicsChemistryPhysicsAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationMetal and Thin Film Mechanics