Characterization of Al-doped Mn–Co–Ni–O NTC thermistor films prepared by the magnetron co-sputtering approach
Tingting Xuan, Jize Yan, Junhua Wang, Wenwen Kong, Aimin Chang
Topics & Concepts
SputteringMaterials scienceThin filmDopantDopingSputter depositionAnalytical Chemistry (journal)ThermistorAlloyCavity magnetronOptoelectronicsMetallurgyNanotechnologyChemistryElectrical engineeringEngineeringChromatographyElectrical and Thermal Properties of MaterialsFerroelectric and Piezoelectric MaterialsAdvanced Sensor Technologies Research