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Effect of modulation ratio on structure and mechanical properties of WB2/CrN films deposited by direct-current magnetron sputtering

Yanming Liu, Li Tian, Jianxiu Chang, M.R. An, Zhiliang Pei, Di Fan

2020Journal of Alloys and Compounds17 citationsDOI

Topics & Concepts

Sputter depositionModulation (music)Cavity magnetronSputteringMaterials scienceDirect currentCurrent (fluid)OptoelectronicsMetallurgyChemistryThin filmNanotechnologyPhysicsThermodynamicsAcousticsPower (physics)Metal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchBoron and Carbon Nanomaterials Research
Effect of modulation ratio on structure and mechanical properties of WB2/CrN films deposited by direct-current magnetron sputtering | Litcius