Effect of high temperature annealing on resistivity and temperature coefficient of resistance of sputtered platinum thin films of SiO2/Pt/SiOx interfaces
Timo Schössler, Florian Schön, Christian Lemier, G. Urban
Topics & Concepts
Temperature coefficientElectrical resistivity and conductivityAnnealing (glass)Materials sciencePlatinumTantalumThin filmAtmospheric temperature rangeComposite materialGrain boundaryAnalytical Chemistry (journal)MetallurgyMineralogyNanotechnologyChemistryMicrostructureElectrical engineeringEngineeringMeteorologyPhysicsCatalysisBiochemistryChromatographySemiconductor materials and devicesCopper Interconnects and ReliabilityForce Microscopy Techniques and Applications