Paving the way toward the world's first 200mm SiC pilot line
Mattia Musolino, Xueping Xu, Hui Wang, Varathajan Rengarajan, Ilya Zwieback, Gary Ruland, Danilo Crippa, Marco Mauceri, Michele Calabretta, Angelo Messina
Topics & Concepts
WaferMaterials sciencePolishingSlicingSilicon carbideElectronicsEpitaxyEngineering physicsLayer (electronics)Mechanical engineeringOptoelectronicsElectrical engineeringNanotechnologyComposite materialEngineeringSilicon Carbide Semiconductor TechnologiesElectromagnetic Compatibility and Noise SuppressionCopper Interconnects and Reliability