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Effect of temperature and deposition technology on the microstructure, chemistry and tribo-mechanical characteristics of Ti-B based thin films by magnetron sputtering

Silvia Maria Deambrosis, Valentina Zin, Francesco Montagner, Cecilia Mortalò, M. Fabrizio, Enrico Miorin

2020Surface and Coatings Technology17 citationsDOI

Topics & Concepts

High-power impulse magnetron sputteringMaterials scienceMicrostructureSputter depositionThin filmMetallurgyCavity magnetronTexture (cosmology)WaferSubstrate (aquarium)Composite materialSputteringNanotechnologyComputer scienceGeologyArtificial intelligenceImage (mathematics)OceanographyMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchAdvanced materials and composites
Effect of temperature and deposition technology on the microstructure, chemistry and tribo-mechanical characteristics of Ti-B based thin films by magnetron sputtering | Litcius