A wafer-level characterization method of thin film transverse piezoelectric coefficient evaluation
Chong Yang, Lei Zhao, Jingwei He, Jinghan Gan, Aocheng Bao, Zhiwei You, Yufeng Gao, Isaku Kanno, Yipeng Lu
Topics & Concepts
WaferCharacterization (materials science)Transverse planeMaterials sciencePiezoelectricityPiezoelectric coefficientComposite materialEngineeringOptoelectronicsStructural engineeringNanotechnologyAcoustic Wave Resonator TechnologiesAdvanced MEMS and NEMS TechnologiesElectronic Packaging and Soldering Technologies