Modification of structure and wear resistance of closed-field unbalanced-magnetron sputtered MoS2 film by vacuum-heat-treatment
Rui Zhang, Qifeng Cui, Lijun Weng, Jiayi Sun, Ming Hu, Yanlong Fu, Desheng Wang, Dong Jiang, Xiaoming Gao
Topics & Concepts
Materials scienceMicrostructureAmorphous solidSputter depositionTribologyComposite materialCavity magnetronUltra-high vacuumMetallurgyAtmospheric temperature rangeThin filmSputteringNanotechnologyThermodynamicsCrystallographyPhysicsChemistryMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchMXene and MAX Phase Materials