Perpendicular magnetic anisotropy in as-deposited CoFeB/MgO thin films
Kaihua Lou, Tunan Xie, Qianwen Zhao, Baiqing Jiang, ChaoChao Xia, Hanying Zhang, Zhihong Yao, Chong Bi
Abstract
Fabrication of perpendicularly magnetized ferromagnetic films on various buffer layers, especially on numerous newly discovered spin–orbit torque (SOT) materials to construct energy-efficient spin-orbitronic devices, is a long-standing challenge. Even for the widely used CoFeB/MgO structures, perpendicular magnetic anisotropy (PMA) can only be established on limited buffer layers through post-annealing above 300 °C. Here, we report that the PMA of CoFeB/MgO films can be established reliably on various buffer layers in the absence of post-annealing. Further results show that precise control of MgO thickness, which determines oxygen diffusion in the underneath CoFeB layer, is the key to obtain the as-deposited PMA. Interestingly, contrary to the previous understanding, post-annealing does not significantly influence the well-established as-deposited PMA but indeed enhances unsaturated PMA with a thick MgO layer by modulating oxygen distributions, rather than crystallinity or Co– and Fe–O bonding. Moreover, our results indicate that oxygen diffusion also plays a critical role in PMA degradation at high temperatures. These results provide a practical approach to build spin-orbitronic devices based on various high-efficient SOT materials.