Low-noise Kerr frequency comb generation with low temperature deuterated silicon nitride waveguides
Zeru Wu, Yanfeng Zhang, Shihao Zeng, Jiaqi Li, Yaozu Xie, Yujie Chen, Siyuan Yu
Abstract
We report very low-loss deuterated silicon nitride (SiN x :D) micro-ring resonators fabricated by back-end CMOS compatible low-temperature plasma-enhanced chemical vapor deposition (PECVD) without annealing. Strong confinement micro-ring resonators with a quality factor of > 2 million are achieved, corresponding to a propagation loss in the 1460-1610 nm wavelength range of ∼ 0.17 dB/cm. We further report the generation of low-noise coherent Kerr microcomb states including different perfect soliton crystals (PSC) in PECVD SiN x :D micro-ring resonators. These results manifest the promising potential of the back-end CMOS compatible SiN x :D platform for linear and nonlinear photonic circuits that can be co-integrated with electronics.