Investigating the advanced characteristics of SiC based piezoresistive pressure sensors
Xingbao Huang, Xiao Zhang
Topics & Concepts
Materials sciencePiezoresistive effectSilicon carbideHysteresisPressure sensorOptoelectronicsNonlinear systemSensitivity (control systems)SiliconVibrationExcitationAcousticsElectronic engineeringComposite materialElectrical engineeringMechanical engineeringCondensed matter physicsPhysicsEngineeringQuantum mechanicsAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsAdvanced Sensor Technologies Research