A niobium pentoxide waveguide sensor for on-chip mid-infrared absorption spectroscopic methane measurement
R. Bi, Mingquan Pi, Chuantao Zheng, Huan Zhao, Lei Liang, Fang Song, Dingdi Wang, Yù Zhang, Yiding Wang, Frank K. Tittel
Topics & Concepts
Materials scienceWaveguideNiobium pentoxideOptoelectronicsRefractive indexTantalum pentoxideSputter depositionInfraredOpticsNiobiumDielectricSputteringThin filmNanotechnologyMetallurgyPhysicsSpectroscopy and Laser ApplicationsPhotonic and Optical DevicesAdvanced Fiber Laser Technologies