Wafer-scale integration of transition metal dichalcogenide field-effect transistors using adhesion lithography
Van Luan Nguyen, Minsu Seol, Junyoung Kwon, Eun‐Kyu Lee, Won-Jun Jang, Hyo Won Kim, Ce Liang, Jong‐Hoon Kang, Jiwoong Park, Min Seok Yoo, Hyeon‐Jin Shin
Topics & Concepts
WaferMolybdenum disulfideMaterials scienceEtching (microfabrication)LithographyNanotechnologyMonolayerAdhesionTransistorPhotolithographyField-effect transistorSurface energyOptoelectronicsIsotropic etchingSemiconductorSiliconLayer (electronics)Composite materialElectrical engineeringEngineeringVoltage2D Materials and ApplicationsNanowire Synthesis and ApplicationsGraphene research and applications