Effect of chemical action on shear thickening polishing of YAG
Wei Fang, Jiajie Gu, Zewei Tang, Zhilong Song, Wenhong Zhao, Binghai Lyu
Topics & Concepts
PolishingChemical-mechanical planarizationMaterials scienceAbrasiveSlurrySurface roughnessX-ray photoelectron spectroscopyCrystal (programming language)Surface finishComposite materialChemical engineeringComputer scienceProgramming languageEngineeringAdvanced Surface Polishing TechniquesLaser Material Processing TechniquesSurface Roughness and Optical Measurements