Characterization of through-silicon vias using laser terahertz emission microscopy
Kristof J. P. Jacobs, Hironaru Murakami, F. Murakami, Kazunori Serita, Eric Beyne, Masayoshi Tonouchi
Topics & Concepts
Terahertz radiationMaterials scienceOptoelectronicsLaserWaferSiliconCMOSCharacterization (materials science)OpticsNanotechnologyPhysicsTerahertz technology and applicationsPhotonic and Optical DevicesPhase-change materials and chalcogenides